Senior Engineer Sustaining Process Engineering

Job Opportunity: Sr. Engineer, Sustaining Process Engineering 

Location: Ansan, South Korea. 
Division: Materials Solutions (MS) 
Reports To: Director of Fab Technology and Engineering 

Core Purpose of the Role 

The Sustaining Process Engineer will be a key member of the Hardware Sustaining team, responsible for maintaining stable performance of Atomic Layer Deposition (ALD) tools and associated process modules through upkeep and improvement of Entegris precursor delivery cabinet product line. This role focuses on cabinet reliability, process stability, troubleshooting, and continuous improvement to enable highvolume production at our customers’ sites.  

The engineer will collaborate closely with equipment engineers, technicians, and manufacturing teams to ensure our precursor delivery cabinet product line enables ALD hardware and process modules to operate at top performance with minimal downtime. 

Entegris is seeking a highly motivated, customer-centric Global Sustaining Process Engineer to support our deployed Precursor Delivery Systems Product Line globally. This role is essential to ensuring safe, high-quality, and timely installations while driving strategic capacity-building initiatives to support our customers and expand our market presence. 

Primary accountability is post-release sustaining of the installed base (process stability, reliability improvement, and standardization). This role does not own new process development, initial tool deployment/commissioning, or day-to-day field execution. 

Key Responsibilities 

1. Tool & Hardware Sustaining 

• Serve as sustaining technical owner for ALD hardware modules and chambers (thermal and plasmaenhanced). 

• Work with our OEM/IDM partners to gain understanding of tool health, performance, stability, and hardware degradation trends as they relate to our chemistry supply cabinets and use the gain knowledge to provide feedback for improvements. 

• Identify and resolve chronic tool issues, hardware failures, and longterm reliability gaps. 

• Define and optimize preventive maintenance (PM) procedures on our PDCs to improve uptime and chamber stability. 

• Partner with Equipment Engineering to improve MTBF/MTTR and reduce unscheduled downtime. 

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2. Process Stability & Control 

• Provide tool understanding to improve process performance across the installed base. 

• Monitor SPC charts, alarms, excursion trends, and chambertochamber matching limitations. 

• Assess out-of-control or out-of-spec conditions by performing structured analysis and defining standardized recovery/prevention plans in collaboration with operations teams. 

• Support recipe stabilization and standardized tuning guidance after hardware events (e.g., chamber clean, parts replacement, kit change). 

3. Troubleshooting & Root Cause Analysis 

• Lead root cause investigations for process drift, particle issues, metrology shifts, and equipment faults. 

• Utilize structured problemsolving methods (5Why, Fishbone, DMAIC, 8D). 

• Coordinate crossfunctional response plans and corrective actions after tool or process excursions. 

• Coordinate with OEMs and internal stakeholders to review recurring issues, reliability trends, and corrective actions through established change-control and sustaining review processes. 

4. Continuous Improvement 

• Drive initiatives to improve tool availability, throughput, and cost-of-ownership. 

• Optimize chamber parts life, process chamber kits, and ALD module performance. 

• Evaluate hardware changes, new components, or retrofit kits for performance improvement. 

• Support hardware qualifications, engineering change orders (ECO), and configuration control. 

5. Documentation & Communication 

• Document chamber health parameters, troubleshooting procedures, and best-known methods (BKMs). 

• Provide clear handoff updates to manufacturing, equipment teams, and shift engineering. 

• Present findings, trends, and improvement opportunities to sustaining leadership. 

Qualifications 

Required 

• Bachelor’s or Master’s in Materials Science, Chemical Engineering, Mechanical Engineering, Electrical Engineering, or related field. 

• 5–7+ years of hands-on experience with ALD or thinfilm deposition systems in a manufacturing environment. 

• Strong understanding of vacuum systems, gas panels, valves, plasma systems, and hardware interactions. 

• Proficiency with SPC, data analysis, and troubleshooting of semiconductor process tools. 

• Ability to manage priorities in a fastpaced production setting. 

• Ability to travel internationally up to 50%. 

• English proficiency required. 

Preferred 

• Experience in hardware sustaining, equipment reliability, or tool ownership roles. 

• Familiarity with ALD platforms from ASM, Lam Research, TEL, Applied Materials, or similar. 

• Understanding of chamber matching, kit management, and processequipment interaction. 

• Experience with JMP, Python, or other data analytics tools. 

• Knowledge of contamination control and cleanroom operation. 

Key Competencies 

• Strong mechanical aptitude with process understanding 

• Excellent troubleshooting and rootcause analysis skills 

• Clear communication and crossfunctional collaboration 

• Ownership mindset with a focus on reliability and uptime 

• Ability to drive hardware and process improvements independently 

Success Metrics 

Success in this role is measured not only by project outcomes but also by how those outcomes are achieved. Key competencies include: 

• Safety First: Promote and maintain a safe work environment. 

• Team Building and Collaboration: Share knowledge and support team success. 

• Accountability: Take ownership of tasks and deliver results. 

• Customer Centricity: Prioritize customer needs and satisfaction. 

• Adaptability: Thrive in a fast-paced, evolving environment. 

• Communication: Effectively engage across all levels of the organization and with customers. 

Why Join Us? 

• Be part of a global leader in advanced materials and delivery systems. 

• Work on high-impact projects with cross-functional and international teams. 

• Drive innovation and capacity growth in a critical industry sector. 

• Enjoy competitive compensation, professional development, and global exposure.